{"id":16232,"date":"2023-11-17T15:04:52","date_gmt":"2023-11-17T13:04:52","guid":{"rendered":"https:\/\/canatu.com\/?p=16232"},"modified":"2025-10-03T12:14:40","modified_gmt":"2025-10-03T09:14:40","slug":"canatu-presented-membranes-at-semicon-europa","status":"publish","type":"post","link":"https:\/\/canatu.com\/company\/carbon-age-news\/canatu-presented-membranes-at-semicon-europa\/","title":{"rendered":"Canatu presented membranes at SEMICON Europa"},"content":{"rendered":"\n
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During the\u00a0Executive Forum on Materials Innovation<\/a>\u00a0at\u00a0SEMICON Europa 2023<\/a>\u00a0Emma Salmi, Head of Synthesis, presented \u2018Canatu carbon nanotube membranes as a versatile material platform for EUV lithography.\u2019 She highlighted the benefits of our unique\u00a0carbon nanotube manufacturing<\/a>\u00a0process, emphasized the expertise gained from mass-producing EUV membranes since 2021, and elaborated on the\u00a0customization<\/a>\u00a0of these\u00a0membranes<\/a> for diverse applications such as EUV pellicles<\/a>, debris filters and optical filters<\/a>, highlighting remarkable versatility they offer.<\/p>\n<\/p>\n<\/div>\n\n\n

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Attendees gained insights into the benefits of Canatu\u2019s floating catalyst chemical vapor deposition (FC-CVP) process using dry deposition method, which yields long and pristine carbon nanotubes enabling better performance in the end applications. High control over the synthesis allows tailoring of carbon nanotube network density, bundle size, tube diameter, and wall count. The direct fabrication method with tailorable morphology combined with the exceptional mechanical and thermal properties of carbon nanotubes provides a versatile platform technology, which can be further modified with post process steps such as purification to remove metal impurities. Canatu\u2019s carbon nanotube membranes<\/a> are used e.g. in EUV pellicles<\/a>.<\/p>\n\n\n\n

Emma Salmi<\/a> is a senior nanomaterials engineer at Canatu. She has been spearheading the development of free-standing carbon nanotube membranes with primary focus on the FCCVD synthesis and early processing steps for optimum pellicle manufacturing for two years. Her background encompasses nanotechnology, thin film deposition systems and carbon nanomaterials with 15 years of industrial and academic experience. She has 37 peer-reviewed publications, conference papers and patents.<\/p>\n\n\n\n\n

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Contact<\/h2>\n
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Mari Makkonen<\/div>\n
VP, IR, Communications and Marketing<\/div>\n mari.makkonen@canatu.com<\/a>\n +358 504 422 343<\/a>\n <\/div>\n <\/div>\n<\/div>\n\n\n
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