{"id":1663,"date":"2022-02-14T13:41:58","date_gmt":"2022-02-14T11:41:58","guid":{"rendered":"https:\/\/canatu.com\/?page_id=1663"},"modified":"2025-10-31T14:27:31","modified_gmt":"2025-10-31T12:27:31","slug":"euv-pellicles","status":"publish","type":"page","link":"https:\/\/canatu.com\/products\/semiconductor\/euv-pellicles\/","title":{"rendered":"EUV pellicles"},"content":{"rendered":"\n<p><br><\/p>\n\n\n\n\n<div class=\"block block--main-content-title-left fullwidth\" >\n  <div class=\"block__wrapper\">\n    <div class=\"block__content\">\n      <h2>Pellicles made of CNT membrane protect the photomask from defects during EUV lithography<\/h2>\n      <div class=\"block__text\">\n        \n\n<p>EUV pellicles are crucial for the future of the semiconductor industry. There is a growing demand for advanced chips, driven by advancements in artificial intelligence (AI) and computing, with sub-7nm chips made using the EUV technology growing the fastest. The next generation high-power EUV lithography machines operating at &gt;500W require pellicles to protect photomasks from particle contamination during chip production. Traditional materials struggle to withstand higher heat loads and mechanical stress of the more advanced EUVL machines, leading to performance issues. Canatu pellicles made of CNT membranes have the potential to outperform conventional composite pellicles in handling the higher heat loads and mechanical stresses of next-generation EUV lithography machines. Canatu CNT pellicle membranes support the productivity increase potential in the EUV lithography process by up to 8-15%.<\/p>\n\n\n\n<p><strong>Key properties:<\/strong><\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>High EUV transmission<\/li>\n\n\n\n<li>High thermal stability up to 1500\u00b0C in vacuum<\/li>\n\n\n\n<li>Exceptional strength<\/li>\n\n\n\n<li>High uniformity<\/li>\n<\/ul>\n\n\n      <\/div>\n    <\/div>\n  <\/div>\n<\/div>\n\n\n\n\n\n<div class=\"block block--alternating-images-with-text layout--left fullwidth\" >\n  <div class=\"block__wrapper\">\n          <div class=\"block__row odd\">\n        <div class=\"block__image\">\n                    <picture>\n  <source srcset=\"https:\/\/canatu.com\/wp-content\/uploads\/2023\/11\/EUVLithographyphotomaskandpellicle-1-2.webp\" type=\"image\/webp\">\n  <source srcset=\"https:\/\/canatu.com\/wp-content\/uploads\/2023\/11\/EUVLithographyphotomaskandpellicle-1-2.png\" type=\"image\/png\">\n  <img decoding=\"async\" src=\"https:\/\/canatu.com\/wp-content\/uploads\/2023\/11\/EUVLithographyphotomaskandpellicle-1-2.png\" alt=\"EUV pellicles; euv pellicle used in euv lithography\" loading=\"lazy\">\n<\/picture>        <\/div>\n        <div class=\"block__content\">\n          <h3>CNT is the material choice for EUV pellicles<\/h3>\n          <div class=\"wysiwyg-content\"><p>The next-gen EUV scanner will introduce high power levels of over 500W, enabling the next step in efficiency. Higher power levels and reticle acceleration cause high heat loads and mechanical stress on the pellicle. Carbon nanotubes have emerged as the most promising material for pellicles used in high power EUVL machines due to their optical, mechanical and thermal properties<\/p>\n<\/div>\n                        <a class=\"cta-button\" href=\"https:\/\/canatu.com\/company\/carbon-age-news\/cnt-is-the-material-choice-for-the-most-advanced-euv-pellicles\/\" target=\"_blank\">Read more<\/a>\n           \n        <\/div>\n      <\/div>\n          <div class=\"block__row even\">\n        <div class=\"block__image\">\n                    <picture>\n  <source srcset=\"https:\/\/canatu.com\/wp-content\/uploads\/2022\/02\/EUV-pellicle-IMEC-Canatu-carbon-nanotubes-e1645440109406-1280x870.webp\" type=\"image\/webp\">\n  <source srcset=\"https:\/\/canatu.com\/wp-content\/uploads\/2022\/02\/EUV-pellicle-IMEC-Canatu-carbon-nanotubes-e1645440109406-1280x870.png\" type=\"image\/png\">\n  <img decoding=\"async\" src=\"https:\/\/canatu.com\/wp-content\/uploads\/2022\/02\/EUV-pellicle-IMEC-Canatu-carbon-nanotubes-e1645440109406-1280x870.png\" alt=\"EUV pellicle, imec\" loading=\"lazy\">\n<\/picture>        <\/div>\n        <div class=\"block__content\">\n          <h3>Imec demonstrates CNT pellicle use on EUV scanner <\/h3>\n          <div class=\"wysiwyg-content\"><p>Since 2015, Canatu has been working with Imec to develop CNT pellicle membranes that meet targets for lifetime and properties such as transmittance, thermal durability, permeability, and strength.<\/p>\n<\/div>\n                        <a class=\"cta-button\" href=\"https:\/\/www.imec-int.com\/en\/press\/imec-demonstrates-cnt-pellicle-utilization-euv-scanner\" target=\"\" rel=\"noopener\">Read more<\/a>\n           \n        <\/div>\n      <\/div>\n      <\/div>\n<\/div>\n\n\n\n\n<div class=\"block block--assets-download fullwidth dark-bg\"  data-application-type=\"EUV pellicles\">\n  <div class=\"block__wrapper\">\n    <div class=\"block__content\">\n              <h2 class=\"block__title\">Download technical paper<\/h2>\n                    <p class=\"block__description\">Please download the most recent 2023 SPIE Photomask + EUVL Conference proceedings to gain deeper understanding of our versatile platform technology, unique CNT synthesis and direct dry deposition benefits, common tailoring, and potential uses for our carbon nanotube membranes. <\/p>\n                    <button class=\"assets-download__button\">Download <\/button>\n        <div class=\"assets-download__popup\">\n          <div class=\"popup-wrapper\">\n                        <div class=\"popup__content\">\n              <img loading=\"lazy\" decoding=\"async\" class=\"assets-download__close\" src=\"https:\/\/canatu.com\/wp-content\/themes\/canatu\/dist\/images\/popup-close.svg\" alt=\"Close\" width=\"10\" height=\"11\">\n              <h2 class=\"assets-download__popup-title\">Download technical paper<\/h2>\n                            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You will be added on our newsletter mailing list and can opt-out at any time.<\\\/span><span style=\\\"font-family: -apple-system, BlinkMacSystemFont, &quot;Segoe UI&quot;, Roboto, Oxygen-Sans, Ubuntu, Cantarell, &quot;Helvetica Neue&quot;, sans-serif;\\\">&nbsp;<\\\/span>&nbsp;We safeguard your data in accordance with our <a href=\\\"\\\/privacy-policy\\\">privacy policy<\\\/a>.<\\\/p>\",\"label_pos\":\"above\",\"parentType\":\"html\",\"element_templates\":[\"html\",\"input\"],\"old_classname\":\"\",\"wrap_template\":\"wrap\"},{\"objectType\":\"Field\",\"objectDomain\":\"fields\",\"editActive\":false,\"order\":6,\"idAttribute\":\"id\",\"type\":\"hidden\",\"label\":\"Current page\",\"key\":\"pipedrive_custom_field_e8c124f296aeefe7849fd28d088824f378c0bb74\",\"default\":\"{wp:post_title}\",\"admin_label\":\"\",\"drawerDisabled\":false,\"manual_key\":true,\"id\":117,\"beforeField\":\"\",\"afterField\":\"\",\"value\":\"EUV pellicles\",\"label_pos\":\"above\",\"parentType\":\"hidden\",\"element_templates\":[\"hidden\",\"input\"],\"old_classname\":\"\",\"wrap_template\":\"wrap-no-label\"},{\"objectType\":\"Field\",\"objectDomain\":\"fields\",\"editActive\":false,\"order\":7,\"idAttribute\":\"id\",\"label\":\"Current URL\",\"type\":\"hidden\",\"key\":\"pipedrive_custom_field_9517a9e21a950b023b1ff40e702c9ff435049d97\",\"default\":\"{wp:post_url}\",\"admin_label\":\"\",\"manual_key\":true,\"drawerDisabled\":false,\"id\":205,\"beforeField\":\"\",\"afterField\":\"\",\"value\":\"https:\\\/\\\/canatu.com\\\/products\\\/semiconductor\\\/euv-pellicles\\\/\",\"label_pos\":\"above\",\"parentType\":\"hidden\",\"element_templates\":[\"hidden\",\"input\"],\"old_classname\":\"\",\"wrap_template\":\"wrap-no-label\"},{\"objectType\":\"Field\",\"objectDomain\":\"fields\",\"editActive\":false,\"order\":8,\"idAttribute\":\"id\",\"label\":\"Application type\",\"type\":\"hidden\",\"key\":\"pipedrive_custom_field_897c1c61ea4dcea7f61b535efa0280d2caea75bb\",\"default\":\"\",\"admin_label\":\"\",\"manual_key\":true,\"drawerDisabled\":false,\"element_class\":\"pipedrive-application-type\",\"id\":206,\"beforeField\":\"\",\"afterField\":\"\",\"value\":\"\",\"label_pos\":\"above\",\"parentType\":\"hidden\",\"element_templates\":[\"hidden\",\"input\"],\"old_classname\":\"\",\"wrap_template\":\"wrap-no-label\"},{\"objectType\":\"Field\",\"objectDomain\":\"fields\",\"editActive\":false,\"order\":9,\"idAttribute\":\"id\",\"type\":\"hcaptcha-for-ninja-forms\",\"label\":\"\",\"container_class\":\"\",\"element_class\":\"\",\"size\":\"visible\",\"key\":\"hcaptcha-for-ninja-forms_1652874476701\",\"drawerDisabled\":false,\"hcaptcha\":\"\\t\\t<input\\n\\t\\t\\t\\ttype=\\\"hidden\\\"\\n\\t\\t\\t\\tclass=\\\"hcaptcha-widget-id\\\"\\n\\t\\t\\t\\tname=\\\"hcaptcha-widget-id\\\"\\n\\t\\t\\t\\tvalue=\\\"eyJzb3VyY2UiOlsibmluamEtZm9ybXNcL25pbmphLWZvcm1zLnBocCJdLCJmb3JtX2lkIjo2fQ==-17ebc8d38648e50029c65b6b1c1c5fec\\\">\\n\\t\\t\\t\\t<h-captcha id=\\\"hcaptcha-nf-699e089c667834.79313751\\\" data-fieldId=\\\"192\\\"\\n\\t\\t\\tclass=\\\"h-captcha\\\"\\n\\t\\t\\tdata-sitekey=\\\"8f6f51d1-55eb-4d1b-ba02-b279427e3ffc\\\"\\n\\t\\t\\tdata-theme=\\\"light\\\"\\n\\t\\t\\tdata-size=\\\"normal\\\"\\n\\t\\t\\tdata-auto=\\\"false\\\"\\n\\t\\t\\tdata-ajax=\\\"false\\\"\\n\\t\\t\\tdata-force=\\\"false\\\">\\n\\t\\t<\\\/h-captcha>\\n\\t\\t\",\"id\":192,\"beforeField\":\"\",\"afterField\":\"\",\"value\":\"\",\"label_pos\":\"above\",\"parentType\":\"textbox\",\"element_templates\":[\"hcaptcha\",\"input\"],\"old_classname\":\"\",\"wrap_template\":\"wrap\"},{\"objectType\":\"Field\",\"objectDomain\":\"fields\",\"editActive\":false,\"order\":10,\"idAttribute\":\"id\",\"type\":\"submit\",\"label\":\"Download asset\",\"processing_label\":\"Processing\",\"container_class\":\"\",\"element_class\":\"\",\"key\":\"download_asset_1646640731826\",\"drawerDisabled\":false,\"field_label\":\"Send message\",\"field_key\":\"send_message_1644223026196\",\"id\":84,\"beforeField\":\"\",\"afterField\":\"\",\"value\":\"\",\"label_pos\":\"above\",\"parentType\":\"textbox\",\"element_templates\":[\"submit\",\"button\",\"input\"],\"old_classname\":\"\",\"wrap_template\":\"wrap-no-label\"}];nfForms.push(form);<\/script>\n        \t\n                            <div class=\"assets-download__material\" id=\"assets-download__material6\" data-id=\"16079\"><\/div>  \n            <\/div>\n             <\/div>\n         <\/div>\n          <\/div>\n  <\/div>\n<\/div>\n\n\n<h2 class=\"wp-block-heading\" id=\"the-most-promising-euv-pellicles-for-high-na-scanners\">CNT is a superior material for EUV pellicles<\/h2>\n\n\n\n<p>Fabricating a carbon nanotube membrane that is thin enough to limit the imaging impact while robust enough to survive handling is extremely challenging.<\/p>\n\n\n\n<p>Firstly, the material must be highly transparent to the 13.5nm light that is absorbed by most materials. The higher the transmittance, the better the output, effectively lowering the cost per unit.<\/p>\n\n\n\n<blockquote class=\"wp-block-quote is-layout-flow wp-block-quote-is-layout-flow\">\n<p>Canatu CNT pellicle membranes support productivity increase potential in the EUV lithography process by up to 7-15%.<\/p>\n<\/blockquote>\n\n\n\n<p>Secondly, high transmission requirements must be met in order to support the trend towards increasing source power that results in higher temperatures. At 800W and above in the current scanner environment, other existing options begin to deteriorate.<\/p>\n\n\n\n<p>High transmission and heat resistance aside, low flare is also required to print features with extreme precision without pattern distortion. Finally, EUV pellicles must meet stringent chemical and mechanical requirements to withstand the EUV scanner environment.<\/p>\n\n\n\n<blockquote class=\"wp-block-quote is-layout-flow wp-block-quote-is-layout-flow\">\n<p>Carbon nanotubes are emerging as the most promising material for EUV pellicles used in the next-gen high-power scanners.<\/p>\n<\/blockquote>\n\n\n\n<p>Since 2015, Canatu has collaborated with Imec, a world-leading research and innovation hub in nanoelectronics and digital technologies, to develop CNT-based EUV pellicles.<\/p>\n\n\n\n<p>EUV pellicles were mounted on reticles and exposed in the NXE:3300 EUV scanner at Imec, demonstrating the successful fabrication and scanner handling of full-field CNT pellicles. The tested CNT pellicles had a single-pass EUV transmission up to 97%. The impact on imaging was found to be low and correctable.<\/p>\n\n\n\n\n<div class=\"block block--large-person-card dark-bg fullwidth\" >\n  <h2>Contact our specialist in CNT pellicle membranes<\/h2>\n  <div class=\"block__wrapper\">\n          <div class=\"block__image\">\n                <picture>\n  <source srcset=\"https:\/\/canatu.com\/wp-content\/uploads\/2025\/09\/Thomas-Gadda_yellow_path.webp\" type=\"image\/webp\">\n  <source srcset=\"https:\/\/canatu.com\/wp-content\/uploads\/2025\/09\/Thomas-Gadda_yellow_path.png\" type=\"image\/png\">\n  <img decoding=\"async\" src=\"https:\/\/canatu.com\/wp-content\/uploads\/2025\/09\/Thomas-Gadda_yellow_path.png\" alt=\"\" loading=\"lazy\">\n<\/picture>      <\/div>\n        <div class=\"block__content\">\n      <div class=\"person-name\">Thomas G\u00e4dda<\/div>\n              <div class=\"person-title\">CPO, Semiconductor BU<\/div>\n                    <a class=\"person-email\" href=\"mailto:thomas.gadda@canatu.com\">thomas.gadda@canatu.com<\/a>\n                <\/div>\n  <\/div>\n<\/div>\n\n\n<div class=\"block block--lead-form\"  data-application-type=\"EUV pellicles\">\n  <div class=\"block__wrapper\">\n    <div class=\"block__content\">\n              <h3 class=\"block__title\">Send us a message <\/h3>\n                          <noscript class=\"ninja-forms-noscript-message\">\n\tNotice: JavaScript is required for this content.<\/noscript>\n<div id=\"nf-form-1-cont\" class=\"nf-form-cont\" aria-live=\"polite\" aria-labelledby=\"nf-form-title-1\" aria-describedby=\"nf-form-errors-1\" role=\"form\">\n\n    <div class=\"nf-loading-spinner\"><\/div>\n\n<\/div>\n        <!-- That data is being printed as a workaround to page builders reordering the order of the scripts loaded-->\n        <script>var formDisplay=1;var nfForms=nfForms||[];var form=[];form.id='1';form.settings={\"objectType\":\"Form Setting\",\"editActive\":true,\"title\":\"Lead 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       \t\n          <\/div>\n  <\/div>\n<\/div>\n\n\n<h2 class=\"wp-block-heading\">Related content<\/h2>\n\n\n\n<div class=\"block block--alternating-images-with-text layout--left fullwidth\" >\n  <div class=\"block__wrapper\">\n          <div class=\"block__row odd\">\n        <div class=\"block__image\">\n                    <picture>\n  <source srcset=\"https:\/\/canatu.com\/wp-content\/uploads\/2023\/08\/canatu_front_page_large_image_highlight_9-1280x776.webp\" type=\"image\/webp\">\n  <source srcset=\"https:\/\/canatu.com\/wp-content\/uploads\/2023\/08\/canatu_front_page_large_image_highlight_9-1280x776.jpg\" type=\"image\/jpeg\">\n  <img decoding=\"async\" src=\"https:\/\/canatu.com\/wp-content\/uploads\/2023\/08\/canatu_front_page_large_image_highlight_9-1280x776.jpg\" alt=\"\" loading=\"lazy\">\n<\/picture>        <\/div>\n        <div class=\"block__content\">\n          <h3>Canatu grants license for commercial production of CNT pellicles to FST<\/h3>\n          <div class=\"wysiwyg-content\"><p>Canatu granted a commercial production license for the first CNT100 SEMI reactor to Korean semiconductor company FINE SEMITECH CORPORATION (\u201cFST\u201d). The license authorizes FST to mass-produce CNT pellicle membranes using the CNT100 SEMI reactor, which will be operated by FST.<\/p>\n<\/div>\n                        <a class=\"cta-button\" href=\"https:\/\/canatu.com\/company\/carbon-age-news\/canatu-grants-license-for-commercial-production-of-cnt-pellicle-membranes-using-cnt100-semi-reactor\/\" target=\"\">Read press release<\/a>\n           \n        <\/div>\n      <\/div>\n          <div class=\"block__row even\">\n        <div class=\"block__image\">\n                    <picture>\n  <source srcset=\"https:\/\/canatu.com\/wp-content\/uploads\/2024\/09\/Canatu_General_Header_photos10_1920x627-1280x627.webp\" type=\"image\/webp\">\n  <source srcset=\"https:\/\/canatu.com\/wp-content\/uploads\/2024\/09\/Canatu_General_Header_photos10_1920x627-1280x627.jpg\" type=\"image\/jpeg\">\n  <img decoding=\"async\" src=\"https:\/\/canatu.com\/wp-content\/uploads\/2024\/09\/Canatu_General_Header_photos10_1920x627-1280x627.jpg\" alt=\"\" loading=\"lazy\">\n<\/picture>        <\/div>\n        <div class=\"block__content\">\n          <h3>How carbon nanotubes can transform the semiconductor industry<\/h3>\n          <div class=\"wysiwyg-content\"><p>Carbon nanotubes present a game-changing solution for preventing defects in EUV lithography, supporting the semiconductor industry\u2019s drive toward extreme miniaturization and improved chip reliability.<\/p>\n<p><em>Published in <a href=\"https:\/\/www.electronicdesign.com\/technologies\/industrial\/article\/55260156\/canatu-transformative-impact-of-carbon-nanotubes-in-the-semiconductor-industry\" target=\"_blank\" rel=\"noopener\">Electronic Design<\/a>\u00a0on Jan.10, 2025.<\/em><\/p>\n<\/div>\n                        <a class=\"cta-button\" href=\"https:\/\/canatu.com\/company\/carbon-age-news\/industry-coverage-how-carbon-nanotubes-can-transform-the-semiconductor-industry\/\" target=\"\">Read article<\/a>\n           \n        <\/div>\n      <\/div>\n          <div class=\"block__row odd\">\n        <div class=\"block__image\">\n                    <picture>\n  <source srcset=\"https:\/\/canatu.com\/wp-content\/uploads\/2024\/09\/CNT-membranes-for-EUV-pellicles_1920x675px.webp\" type=\"image\/webp\">\n  <source srcset=\"https:\/\/canatu.com\/wp-content\/uploads\/2024\/09\/CNT-membranes-for-EUV-pellicles_1920x675px.png\" type=\"image\/png\">\n  <img decoding=\"async\" src=\"https:\/\/canatu.com\/wp-content\/uploads\/2024\/09\/CNT-membranes-for-EUV-pellicles_1920x675px.png\" alt=\"Canatu CNT membranes for EUV pellicles\" loading=\"lazy\">\n<\/picture>        <\/div>\n        <div class=\"block__content\">\n          <h3>Roadblocks to significant yield and cost improvement for chip manufacturers<\/h3>\n          <div class=\"wysiwyg-content\"><p>In chipmaking, a single defect can ruin an entire silicon wafer worth $20,000, a costly margin of error that can accumulate into millions and even billions of losses in the production ledger over time.<\/p>\n<p><em>Published in <a href=\"https:\/\/magazine.semiconductordigest.com\/html5\/reader\/production\/default.aspx?pubname=&amp;edid=40041458-efa1-45bb-9e0b-375ffd17c281&amp;pnum=46\" target=\"_blank\" rel=\"noopener\">Semiconductor Digest<\/a>\u2018s Aug\/Sep issue 2024.<\/em><\/p>\n<\/div>\n                        <a class=\"cta-button\" href=\"https:\/\/canatu.com\/company\/carbon-age-news\/semiconductor-digest-carbon-nanotubes-offer-yield-and-cost-improvement-for-chip-manufacturers\/\" target=\"\">Read article<\/a>\n           \n        <\/div>\n      <\/div>\n          <div class=\"block__row even\">\n        <div class=\"block__image\">\n                    <picture>\n  <source srcset=\"https:\/\/canatu.com\/wp-content\/uploads\/2025\/10\/Canatu-semiconductor-reactor-1_1280x870px-adj.webp\" type=\"image\/webp\">\n  <source srcset=\"https:\/\/canatu.com\/wp-content\/uploads\/2025\/10\/Canatu-semiconductor-reactor-1_1280x870px-adj.png\" type=\"image\/png\">\n  <img decoding=\"async\" src=\"https:\/\/canatu.com\/wp-content\/uploads\/2025\/10\/Canatu-semiconductor-reactor-1_1280x870px-adj.png\" alt=\"\" loading=\"lazy\">\n<\/picture>        <\/div>\n        <div class=\"block__content\">\n          <h3>Canatu receives customer approval for CNT100 SEMI reactor<\/h3>\n          <div class=\"wysiwyg-content\"><p>Canatu has received Site Acceptance Test (SAT) approval for its first CNT100 SEMI reactor and for the related post-processing peripherals, shipped to a semiconductor customer in September 2024. This confirms the CNT100 SEMI reactor\u2019s readiness for mass production of CNT pellicle membranes.<\/p>\n<\/div>\n                        <a class=\"cta-button\" href=\"https:\/\/canatu.com\/company\/carbon-age-news\/canatu-receives-customer-approval-for-its-cnt100-semi-reactor-and-post-processing-equipment-enabling-mass-production-of-advanced-euv-pellicles\/\" target=\"\">Read press release<\/a>\n           \n        <\/div>\n      <\/div>\n      <\/div>\n<\/div>\n\n\n\n\n<div class=\"block block--content-promotion-highlights fullwidth\" >\n  <div class=\"block__wrapper\">\n    <h2>Discover more <\/h2>\n    <div class=\"block__content\">\n              <div class=\"block__row\">\n                      <div class=\"block__image\">\n                            <picture>\n  <source srcset=\"https:\/\/canatu.com\/wp-content\/uploads\/2024\/05\/Canatu-semiconductor-reactor-1_1280x870px.webp\" type=\"image\/webp\">\n  <source srcset=\"https:\/\/canatu.com\/wp-content\/uploads\/2024\/05\/Canatu-semiconductor-reactor-1_1280x870px.png\" type=\"image\/png\">\n  <img decoding=\"async\" src=\"https:\/\/canatu.com\/wp-content\/uploads\/2024\/05\/Canatu-semiconductor-reactor-1_1280x870px.png\" alt=\"\" loading=\"lazy\">\n<\/picture>            <\/div>\n                    <div class=\"block__text\">\n                          <div class=\"highlight-title\">CNT reactors for mass production of EUV pellicles<\/div>\n                        <div class=\"wysiwyg-content\"><p>Canatu sell CNT reactors with limited technology license for in-house production of EUV pellicles. The first CNT100 SEMI reactor and post-processing equipment have received customer approval (SAT) and are now ready for mass production of CNT pellicle membranes. <a href=\"https:\/\/canatu.com\/products\/reactors\/\">Learn more.<\/a><\/p>\n<\/div>\n          <\/div>\n                  <\/div>\n              <div class=\"block__row\">\n                      <div class=\"block__image\">\n                            <picture>\n  <source srcset=\"https:\/\/canatu.com\/wp-content\/uploads\/2022\/02\/Canatu-carbon-nanotube-CNT-freestanding-EUV-membrane-CTO-Ilkka-Varjos-e1645629099556-1280x870.webp\" type=\"image\/webp\">\n  <source srcset=\"https:\/\/canatu.com\/wp-content\/uploads\/2022\/02\/Canatu-carbon-nanotube-CNT-freestanding-EUV-membrane-CTO-Ilkka-Varjos-e1645629099556-1280x870.jpg\" type=\"image\/jpeg\">\n  <img decoding=\"async\" src=\"https:\/\/canatu.com\/wp-content\/uploads\/2022\/02\/Canatu-carbon-nanotube-CNT-freestanding-EUV-membrane-CTO-Ilkka-Varjos-e1645629099556-1280x870.jpg\" alt=\"Ilkka Varjos CTO CNT freestanding EUV membrane\" loading=\"lazy\">\n<\/picture>            <\/div>\n                    <div class=\"block__text\">\n                          <div class=\"highlight-title\">Canatu CTO on EUV pellicles<\/div>\n                        <div class=\"wysiwyg-content\"><p>As EUV lithography becomes the norm for producing high-pitch patterning on wafers, the Canatu CNT will impact our everyday. \u201cFor me, that\u2019s the true sign of carbon age\u201d, said Ilkka Varjos, CTO of Canatu. <a href=\"https:\/\/canatu.com\/company\/carbon-age-stories\/canatu-free-standing-cnt-membrane-creates-unique-value-for-the-euv-applications\/\">Discover more.<\/a><\/p>\n<\/div>\n          <\/div>\n                  <\/div>\n              <div class=\"block__row\">\n                      <div class=\"block__image\">\n                            <picture>\n  <source srcset=\"https:\/\/canatu.com\/wp-content\/uploads\/2022\/03\/EUV-pellicle-1280-x-870-e1648718045322-1280x870.webp\" type=\"image\/webp\">\n  <source srcset=\"https:\/\/canatu.com\/wp-content\/uploads\/2022\/03\/EUV-pellicle-1280-x-870-e1648718045322-1280x870.png\" type=\"image\/png\">\n  <img decoding=\"async\" src=\"https:\/\/canatu.com\/wp-content\/uploads\/2022\/03\/EUV-pellicle-1280-x-870-e1648718045322-1280x870.png\" alt=\"\" loading=\"lazy\">\n<\/picture>            <\/div>\n                    <div class=\"block__text\">\n                          <div class=\"highlight-title\">CNT membrane<\/div>\n                        <div class=\"wysiwyg-content\"><p>Carbon nanotubes can be deposited on an open frame to form membranes of different densities. These membranes offer unique properties, unparalleled by any other material. <a href=\"https:\/\/canatu.com\/carbon-nanotube\/canatu-cnt-product-platforms\/free-standing-cnt-membranes\/\">Discover more<\/a><\/p>\n<\/div>\n          <\/div>\n                  <\/div>\n              <div class=\"block__row\">\n                      <div class=\"block__image\">\n                            <picture>\n  <source srcset=\"https:\/\/canatu.com\/wp-content\/uploads\/2022\/02\/canatu_front_page_background_image_1-e1645536040678-1280x870.webp\" type=\"image\/webp\">\n  <source srcset=\"https:\/\/canatu.com\/wp-content\/uploads\/2022\/02\/canatu_front_page_background_image_1-e1645536040678-1280x870.jpg\" type=\"image\/jpeg\">\n  <img decoding=\"async\" src=\"https:\/\/canatu.com\/wp-content\/uploads\/2022\/02\/canatu_front_page_background_image_1-e1645536040678-1280x870.jpg\" alt=\"\" loading=\"lazy\">\n<\/picture>            <\/div>\n                    <div class=\"block__text\">\n                          <div class=\"highlight-title\">Canatu CNT variants<\/div>\n                        <div class=\"wysiwyg-content\"><p>Canatu has the expertise to effectively adapt carbon nanotubes for different contexts and uses. The customizability and versatility of our synthesis process allows us to create the most advanced CNTs for highly engineered solutions. <a href=\"https:\/\/canatu.com\/carbon-nanotube\/canatu-cnt-variants\/\">Discover CNT versatility<\/a><\/p>\n<\/div>\n          <\/div>\n                  <\/div>\n            <\/div>\n  <\/div>\n<\/div>\n\n\n\n<div class=\"block block--story-listing dark-bg fullwidth\" >\n  <div class=\"block__wrapper\">\n    <a class=\"heading-title\" href=\"\/company\/carbon-age-news\"><h2>Carbon age news<\/h2><\/a>\n    <div class=\"block__content\">\n              <div class=\"block__row\">\n          <a href=\"https:\/\/canatu.com\/company\/carbon-age-news\/canatu-will-release-its-financial-statements-bulletin-for-the-2025-financial-year-on-tuesday-march-3-2026\/\">\n            <div class=\"block__image img-zoom\">\n\t\t\t\t\t\t\t              <picture>\n  <source srcset=\"https:\/\/canatu.com\/wp-content\/uploads\/2026\/02\/GettyImages-1040333764.webp\" type=\"image\/webp\">\n  <source srcset=\"https:\/\/canatu.com\/wp-content\/uploads\/2026\/02\/GettyImages-1040333764.png\" type=\"image\/png\">\n  <img decoding=\"async\" src=\"https:\/\/canatu.com\/wp-content\/uploads\/2026\/02\/GettyImages-1040333764.png\" alt=\"\" loading=\"lazy\">\n<\/picture>\t\t\t\t\t\t<\/div>\n            <div class=\"block__text\">\n              <div class=\"post__meta\">\n                <span class=\"post__category\">News<\/span>\n                <span class=\"post__date\">Feb 23, 2026<\/span>\n              <\/div>\n              <h3 class=\"post__title\">Canatu will release its Financial Statements Bulletin for the 2025 financial year on Tuesday, March 3, 2026<\/h3>\n            <\/div>\n          <\/a>\n        <\/div>\n              <div class=\"block__row\">\n          <a href=\"https:\/\/canatu.com\/company\/carbon-age-news\/canatu-plcs-new-series-a-shares-subscribed-for-with-investor-warrants-have-been-registered-with-the-finnish-trade-register\/\">\n            <div class=\"block__image img-zoom\">\n\t\t\t\t\t\t\t              <picture>\n  <source srcset=\"https:\/\/canatu.com\/wp-content\/uploads\/2024\/09\/Canatu_General_Header_photos12_1920x627-717x450.webp\" type=\"image\/webp\">\n  <source srcset=\"https:\/\/canatu.com\/wp-content\/uploads\/2024\/09\/Canatu_General_Header_photos12_1920x627-717x450.jpg\" type=\"image\/jpeg\">\n  <img decoding=\"async\" src=\"https:\/\/canatu.com\/wp-content\/uploads\/2024\/09\/Canatu_General_Header_photos12_1920x627-717x450.jpg\" alt=\"\" loading=\"lazy\">\n<\/picture>\t\t\t\t\t\t<\/div>\n            <div class=\"block__text\">\n              <div class=\"post__meta\">\n                <span class=\"post__category\">News<\/span>\n                <span class=\"post__date\">Feb 18, 2026<\/span>\n              <\/div>\n              <h3 class=\"post__title\">Canatu Plc\u2019s new series A shares subscribed for with investor warrants have been registered with the Finnish Trade Register<\/h3>\n            <\/div>\n          <\/a>\n        <\/div>\n              <div class=\"block__row\">\n          <a href=\"https:\/\/canatu.com\/company\/carbon-age-news\/canatu-appoints-antti-harmanmaa-as-vp-legal-and-general-counsel\/\">\n            <div class=\"block__image img-zoom\">\n\t\t\t\t\t\t\t              <picture>\n  <source srcset=\"https:\/\/canatu.com\/wp-content\/uploads\/2026\/02\/antti-test-430x450.webp\" type=\"image\/webp\">\n  <source srcset=\"https:\/\/canatu.com\/wp-content\/uploads\/2026\/02\/antti-test-430x450.png\" type=\"image\/png\">\n  <img decoding=\"async\" src=\"https:\/\/canatu.com\/wp-content\/uploads\/2026\/02\/antti-test-430x450.png\" alt=\"\" loading=\"lazy\">\n<\/picture>\t\t\t\t\t\t<\/div>\n            <div class=\"block__text\">\n              <div class=\"post__meta\">\n                <span class=\"post__category\">News<\/span>\n                <span class=\"post__date\">Feb 9, 2026<\/span>\n              <\/div>\n              <h3 class=\"post__title\">Canatu appoints Antti H\u00e4rm\u00e4nmaa as VP, Legal and General Counsel<\/h3>\n            <\/div>\n          <\/a>\n        <\/div>\n          <\/div>\n    <a class=\"cta-button\" href=\"\/company\/carbon-age-news\">Read more news<\/a>\n  <\/div>\n<\/div>\n","protected":false},"excerpt":{"rendered":"<p>CNT is a superior material for EUV pellicles Fabricating a carbon nanotube membrane that is thin enough to limit the imaging impact while robust enough to survive handling is extremely challenging. Firstly, the material must be highly transparent to the 13.5nm light that is absorbed by most materials. The higher the transmittance, the better the [&hellip;]<\/p>\n","protected":false},"author":13,"featured_media":0,"parent":4682,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"page-templates\/key-content-page.php","meta":{"_acf_changed":false,"footnotes":""},"class_list":["post-1663","page","type-page","status-publish","hentry"],"acf":[],"lang":"en","translations":{"en":1663},"pll_sync_post":[],"_links":{"self":[{"href":"https:\/\/canatu.com\/wp-json\/wp\/v2\/pages\/1663","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/canatu.com\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/canatu.com\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/canatu.com\/wp-json\/wp\/v2\/users\/13"}],"replies":[{"embeddable":true,"href":"https:\/\/canatu.com\/wp-json\/wp\/v2\/comments?post=1663"}],"version-history":[{"count":29,"href":"https:\/\/canatu.com\/wp-json\/wp\/v2\/pages\/1663\/revisions"}],"predecessor-version":[{"id":24228,"href":"https:\/\/canatu.com\/wp-json\/wp\/v2\/pages\/1663\/revisions\/24228"}],"up":[{"embeddable":true,"href":"https:\/\/canatu.com\/wp-json\/wp\/v2\/pages\/4682"}],"wp:attachment":[{"href":"https:\/\/canatu.com\/wp-json\/wp\/v2\/media?parent=1663"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}