{"id":3142,"date":"2021-04-20T14:48:00","date_gmt":"2021-04-20T11:48:00","guid":{"rendered":"https:\/\/canatu.com\/?p=3142"},"modified":"2025-10-20T16:03:09","modified_gmt":"2025-10-20T13:03:09","slug":"nano-solutions-for-massive-impact-free-standing-cnt-membranes-for-semiconductor-manufacturing","status":"publish","type":"post","link":"https:\/\/canatu.com\/company\/carbon-age-news\/nano-solutions-for-massive-impact-free-standing-cnt-membranes-for-semiconductor-manufacturing\/","title":{"rendered":"Nano solutions for massive impact: the world’s thinnest and strongest CNT membrane"},"content":{"rendered":"\n

The global semiconductor market is growing rapidly. The growth is driven by advancements in IoT, 5G and autonomous & connected cars requiring faster chips that use less power. EUV lithography is a giant leap forward, yet defects in printing remain the greatest constraint to EUV lithography uptake. Silicon is reaching its physical limits too, calling for advanced materials to keep Moore\u2019s Law on track.<\/p>\n\n\n\n

\"Canatu<\/figure>\n\n\n\n

Carbon is the most versatile material in the universe. When we work with carbon on a molecular level to unleash its full potential. Through our unique process and expertise, we create the most advanced carbon nanotubes for highly engineered solutions. Canatu carbon nanotubes (Canatu CNT) qualities excel in semiconductor applications where high mechanical, optical and electrical properties are critical for Moore\u2019s Law continuance.<\/p>\n\n\n\n

Particle filtration down to the nanoscale<\/h3>\n\n\n\n

CNT membrane is an exceptionally thin yet strong carbon nanotube structure without any substrate support. This random network has a very small pore size, that is capable of filtering particles down to the nanoscale. CNT membrane can be used for example as EUV pellicles<\/a> to prevent reticle (photomask) from contamination.<\/p>\n\n\n\n

High light transmission<\/h3>\n\n\n\n

Thanks to the very small interaction cross-section of carbon, Canatu’s CNT membrane provide extremely good optical properties, unequaled by any other material. These uniquely thin and strong structures feature very high light transmission at EUV \/ X-Ray wavelengths (>97%T at EUV \/ X-Ray) and low light scattering. In addition, CNT membrane have very high heat resistivity of up to 1500\u00b0C without breaking or decomposing, to thrive even in the most extreme conditions. <\/p>\n\n\n\n\n

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Download technical paper<\/h2>\n

Download SPIE Photomask + EUV Lithography conference proceedings to learn more about the unique properties, common modifications, and applications of Canatu CNT membrane. <\/p>\n